1.Extremely Low Background Noise: fA-Level Leakage Current Control

Electrical measurement accuracy is a key indicator for probe stations. This equipment achieves extremely low leakage current levels through its triaxial BNC interface design combined with an optimized shielding structure.

• Room Temperature Environment: Leakage current < 100fA

• Extremely Low-Temperature Environment (-190°C): Leakage current maintained within 500fA

• Ultimate Performance: With system optimization, leakage current can be further compressed to <30fA.

This provides a clean test background for analyzing MOSFET subthreshold swing, weak photocurrents, and the characteristics of high-resistance materials.

2.Wide Temperature Range and High Dynamic Thermal Response

The system adopts a temperature control scheme combining liquid nitrogen cooling and resistance heating, balancing temperature range width with adjustment rate:

• Temperature Control Range: -190°C to 400°C, covering the complete spectrum from low-temperature physics to high-temperature annealing.

• Thermal Accuracy: Controlled by a PID algorithm, achieving stability of ±0.1°C at room temperature and in high-temperature ranges.

• High Efficiency and Balance: The silver sample stage offers excellent thermal conductivity, with a maximum heating rate of 150°C/min, significantly improving the cycling efficiency of temperature-variable experiments.

3.Optical System Compatible with Short Working Distances

To meet the demands of in-situ spectroscopy tests, this probe station achieves deep integration of optics and electronics within a compact structure:

• Ultra-thin Design: The distance from the sample stage to the top surface of the window is only 4mm (Spectroscopy Mode), making it compatible with high-magnification microscopes and short working distance objectives.

• Broad Spectral Transmission: Equipped with JGS-2 quartz glass windows, the transmission band covers 220nm to 2500nm, meeting requirements from deep ultraviolet excitation to near-infrared detection.

• Anti-Frosting Mechanism: A built-in purge holder ensures window clarity during low-temperature tests.

4.High-Vacuum Operating Environment

The equipment features a vacuum chamber that can achieve a high vacuum level of 10E-4 Pa when combined with a molecular pump. Excellent vacuum retention performance effectively prevents sample condensation and frosting at low temperatures or oxidation at high temperatures, ensuring the chemical inertness and physical stability of the experimental environment.

• Micro/Nano Electronic Devices: Temperature-dependent I-V and C-V characterization, and reliability analysis.

• Novel Optoelectronic Devices: In-situ testing of broad-spectrum response, quantum efficiency, and photoluminescence (PL).

• Materials Physics Research: Investigation of electrical behavior during superconducting transitions, ferroelectric/ferromagnetic phase change processes.

This high-vacuum variable-temperature probe station solves the challenges of high-vacuum temperature-dependent testing in space-constrained conditions through precise thermodynamic design and electrical shielding technology. Its rigorous process standards provide stable and accurate experimental support for research institutions.